Shanghai Xinkehui New Material Co., Ltd.

Quartz Plate

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single wafer package in 100-grade cleaning room
  • Description

Product Introduction of Quartz Plate

A Quartz Plate, also known as a Quartz Glass Plate or Fused Quartz Plate, is a high-performance engineering material manufactured from high-purity silicon dioxide (SiO₂ ≥ 99.99%). It is produced by melting natural or synthetic quartz at extremely high temperatures, resulting in exceptional thermal stability, optical transparency, chemical resistance, and mechanical strength. These outstanding properties make quartz plates an ideal choice for demanding industrial, scientific, and optical applications where conventional glass cannot provide sufficient performance.

Compared with ordinary glass, a High Purity Quartz Plate offers a significantly higher softening point, lower thermal expansion coefficient, superior thermal shock resistance, and excellent transmission of ultraviolet (UV), visible, and infrared (IR) light. It can withstand continuous operating temperatures of up to 1100°C and short-term exposure to even higher temperatures without deformation or cracking. In addition, quartz plates exhibit excellent resistance to acids, corrosion, and electrical conductivity, ensuring reliable performance in harsh operating environments.

Quartz plates are available in several types to meet different application requirements, including Transparent Quartz Plate, Opaque Quartz Plate, Synthetic Quartz Plate, and Fused Quartz Plate. Transparent quartz plates are widely used in optical windows, laser systems, UV sterilization equipment, and precision instruments due to their outstanding light transmittance. Opaque quartz plates provide excellent thermal insulation and are commonly used in industrial furnaces and semiconductor thermal processing equipment. Synthetic quartz plates offer ultra-low impurity levels and exceptional UV transmission, making them ideal for semiconductor lithography, high-end optics, and laser applications. Fused quartz plates combine excellent thermal stability, chemical purity, and mechanical strength, making them one of the most widely used materials in advanced manufacturing industries.

Thanks to their unique combination of physical and chemical properties, Quartz Glass Plates are extensively used in semiconductor manufacturing, photovoltaic production, laboratory equipment, analytical instruments, aerospace engineering, medical devices, precision optics, laser technology, and chemical processing. In semiconductor fabrication, quartz plates serve as chamber windows, wafer carriers, furnace components, and process shields because they maintain dimensional stability and purity under high-temperature processing conditions. In laboratories, they are widely used for observation windows, reaction chambers, sample holders, and analytical equipment. In optical systems, quartz plates provide exceptional clarity and stable optical performance across a broad wavelength range.

As a professional Quartz Plate Manufacturer and Quartz Glass Plate Supplier, Shanghai Xinkehui New Material Co., Ltd. specializes in producing high-quality quartz products for customers worldwide. Our High Purity Quartz Plates are manufactured using premium raw materials and advanced processing technologies to ensure outstanding optical quality, precise dimensional accuracy, and consistent product performance. We offer customized sizes, thicknesses, polishing options, CNC machining, drilling, edge finishing, and special-shaped processing to meet the diverse requirements of semiconductor, optical, laboratory, and industrial applications.

With strict quality control, competitive factory pricing, fast delivery, and comprehensive technical support, Shanghai Xinkehui is committed to providing reliable Fused Quartz Plate solutions that help customers improve product performance and manufacturing efficiency. Whether you require standard quartz plates or fully customized quartz components, we are your trusted partner for high-quality quartz materials.

Quartz Plate Specifications

Item Specification
Product Name Quartz Plate / Quartz Glass Plate / Fused Quartz Plate
Material High Purity Fused Quartz (SiO₂ ≥ 99.99%)
Purity ≥ 99.99%
Color Transparent, Opaque (Milky White)
Thickness 0.5 mm – 50 mm (Custom Available)
Length & Width Customized According to Drawing
Maximum Size Up to 1500 × 1000 mm (Customizable)
Surface Finish Polished, Double-Side Polished, Ground, Fire Polished
Surface Roughness Ra < 0.2 μm (Optical Grade Available)
Flatness Customized (Optical Grade Available)
Light Transmittance Over 90% (Visible Light)
Working Temperature 1100°C (Continuous)
Softening Point Approximately 1730°C
Coefficient of Thermal Expansion 5.5 × 10⁻⁷ /K
Density 2.20 g/cm³
Mohs Hardness 5.5 – 6.5
Electrical Resistivity Excellent Electrical Insulation
Chemical Resistance Resistant to Most Acids and Corrosive Chemicals (Except HF)
Machining Service Cutting, CNC Machining, Drilling, Slotting, Edge Grinding, Polishing
Customization OEM & ODM Available
Applications Semiconductor, Optics, Laboratory, Laser, Photovoltaic, Medical, Chemical Processing, Aerospace

Quartz Plate Features

1. High Purity Material (SiO₂ ≥ 99.99%)

Our Quartz Plates are manufactured from high-purity fused quartz with a silicon dioxide (SiO₂) content of 99.99% or higher. The ultra-low impurity level minimizes contamination, making them ideal for semiconductor manufacturing, optical systems, and laboratory applications that demand exceptional material purity.

2. Excellent Optical Transparency

Transparent Quartz Plates provide outstanding light transmission across ultraviolet (UV), visible, and infrared (IR) wavelengths. Their excellent optical clarity makes them widely used for optical windows, laser systems, UV sterilization equipment, and precision scientific instruments.

Quartz-Plate-3 Quartz Plate

3. Outstanding High Temperature Resistance

A Fused Quartz Plate can withstand continuous operating temperatures of up to 1100°C and has a softening point of approximately 1730°C. It maintains excellent dimensional stability even under prolonged exposure to extreme temperatures, making it suitable for furnaces, semiconductor processing, and high-temperature industrial equipment.

4. Low Thermal Expansion

Quartz glass has one of the lowest coefficients of thermal expansion among engineering materials. This unique property allows the plate to resist thermal deformation and cracking during rapid temperature changes, ensuring exceptional thermal shock resistance and long-term reliability.

5. Excellent Chemical Resistance

High Purity Quartz Plates exhibit outstanding resistance to most acids, alkalis, and corrosive chemicals, except hydrofluoric acid (HF). This excellent chemical stability makes them ideal for chemical processing equipment, laboratory instruments, and semiconductor manufacturing environments.

6. High Mechanical Strength

Quartz Plates combine excellent hardness with superior mechanical strength, providing excellent wear resistance and structural stability. They maintain their shape and performance even in demanding industrial applications where durability and precision are critical.

7. Superior Electrical Insulation

Thanks to its excellent dielectric properties, Quartz Glass Plate is an outstanding electrical insulator. It is widely used in semiconductor equipment, electronic manufacturing, high-frequency devices, and electrical insulation components operating under high temperatures.

8. Precision Machining Available

Shanghai Xinkehui New Material Co., Ltd. provides comprehensive precision machining services for Quartz Plates, including CNC machining, precision cutting, drilling, slotting, edge grinding, chamfering, polishing, and custom-shaped fabrication. All products are manufactured according to customer drawings and technical specifications.

Quartz-Plate-5 Quartz Plate

9. Long Service Life

Due to its excellent thermal stability, corrosion resistance, and mechanical durability, a High Purity Quartz Plate offers an exceptionally long service life with minimal maintenance requirements. This helps reduce replacement costs and improve production efficiency in industrial applications.

10. Custom Sizes and OEM Solutions

We offer fully customized Quartz Plate solutions to meet diverse customer requirements. Thickness, dimensions, surface finish, edge treatment, optical polishing, drilled holes, grooves, and special geometries can all be manufactured according to your drawings or application needs. OEM and ODM services are available for global customers across semiconductor, optical, laboratory, photovoltaic, and industrial markets.

Quartz Plate Advantages

Shanghai Xinkehui New Material Co., Ltd. is committed to providing high-quality Quartz Plates that meet the demanding requirements of industries such as semiconductors, optics, laboratories, photovoltaics, and precision manufacturing. Our High Purity Quartz Plates are produced using premium raw materials, advanced manufacturing technology, and strict quality control to ensure outstanding performance and long-term reliability.

1. Superior UV Transmission

Our Transparent Quartz Plates offer exceptional ultraviolet (UV), visible, and infrared (IR) light transmission. With excellent optical clarity and minimal light absorption, they are widely used in UV sterilization equipment, laser systems, optical windows, spectroscopy, and semiconductor photolithography applications.

2. Excellent Thermal Stability

Manufactured from High Purity Fused Quartz, our quartz plates maintain excellent structural integrity under extreme temperatures. They can operate continuously at temperatures up to 1100°C and withstand rapid temperature fluctuations without cracking, making them ideal for high-temperature furnaces, semiconductor processing equipment, and laboratory instruments.

3. Outstanding Corrosion Resistance

Quartz glass is highly resistant to most acids, alkalis, and corrosive chemicals, except hydrofluoric acid (HF). This superior chemical stability ensures reliable performance in aggressive chemical environments, reducing maintenance costs and extending service life.

4. High Dimensional Accuracy

Every Quartz Plate is manufactured with strict dimensional tolerances to ensure precise thickness, flatness, and edge quality. This high level of accuracy makes our products suitable for semiconductor equipment, precision optical systems, and scientific instruments where exact dimensions are essential.

5. Excellent Surface Flatness

Our advanced grinding and polishing processes deliver outstanding surface flatness and excellent surface quality. Optical-grade polishing options are available to meet the demanding requirements of laser optics, precision imaging systems, and analytical instruments.

6. Low Bubble Content

Using carefully selected raw materials and advanced melting technology, our Fused Quartz Plates feature an extremely low bubble content. This improves optical performance, mechanical strength, and overall product reliability, especially in high-precision optical and semiconductor applications.

7. Ultra-Low Impurity Level

With a silicon dioxide (SiO₂) purity of 99.99% or higher, our High Purity Quartz Plates contain extremely low levels of metallic impurities and contaminants. This minimizes the risk of contamination during semiconductor wafer processing, optical manufacturing, and laboratory experiments, ensuring stable and consistent performance.

8. High-Precision CNC Machining

Shanghai Xinkehui offers comprehensive precision machining services for Quartz Glass Plates, including CNC cutting, drilling, slotting, milling, edge grinding, chamfering, polishing, and custom-shaped fabrication. Our experienced engineering team can manufacture complex quartz components according to customer drawings and technical specifications.

9. Stable and Consistent Quality

Quality is our highest priority. Every Quartz Plate undergoes rigorous inspection throughout the manufacturing process, including dimensional measurement, surface quality inspection, optical examination, and final quality verification before shipment. This ensures consistent product performance and dependable quality for every order.

10. Global Export Experience

As an experienced Quartz Plate Manufacturer and Quartz Glass Plate Supplier, Shanghai Xinkehui has supplied quartz products to customers worldwide. Our professional export team provides responsive technical support, customized manufacturing solutions, secure packaging, and efficient global logistics, ensuring a smooth purchasing experience for customers in the semiconductor, optical, laboratory, medical, and industrial sectors.

Quartz Plate Applications

1. Quartz Plate for Semiconductor Industry

The semiconductor industry demands ultra-clean materials capable of withstanding high temperatures and minimizing contamination during wafer fabrication. Quartz Plate for Semiconductor applications is manufactured with SiO₂ purity of 99.99% or higher, providing excellent thermal stability and chemical resistance throughout semiconductor processing.

Typical semiconductor applications include:

  • Wafer carriers
  • Furnace windows
  • Diffusion furnace components
  • Process chamber windows
  • Oxidation equipment
  • Semiconductor shields
  • Inspection windows
  • Wafer handling equipment
  • CVD and PECVD systems

Our precision-machined Fused Quartz Plates help improve manufacturing efficiency while maintaining the cleanliness required for advanced semiconductor production.

2. Solar & Photovoltaic Industry

Quartz plates play a critical role in solar cell manufacturing and photovoltaic production processes. Their excellent heat resistance and low thermal expansion allow them to maintain dimensional stability during high-temperature crystal growth and silicon wafer processing.

Applications include:

  • Solar cell production equipment
  • Silicon crystal growth furnaces
  • Diffusion furnaces
  • Quartz process trays
  • Heating components
  • Protective windows

Our High Purity Quartz Plates help improve manufacturing consistency and extend equipment service life in photovoltaic production environments.

3. Optical Instruments

Transparent Quartz Plate offers exceptional transmission across ultraviolet (UV), visible, and infrared (IR) wavelengths, making it one of the most important materials in modern optical engineering.

Typical optical applications include:

  • Optical windows
  • Precision lenses
  • Spectroscopy systems
  • Imaging equipment
  • UV optical components
  • Infrared optical devices
  • Camera systems
  • Scientific optical instruments

Optical-grade polishing and excellent surface flatness ensure outstanding optical performance with minimal distortion.

4. Quartz Plate for Laboratory Equipment

Laboratory equipment often operates under corrosive chemicals and elevated temperatures. Quartz Plate for Laboratory applications provides outstanding chemical resistance, thermal shock resistance, and optical clarity for scientific research.

Common laboratory applications include:

  • Observation windows
  • Sample holders
  • Reaction chambers
  • Heating platforms
  • Vacuum systems
  • Laboratory furnaces
  • Research equipment
  • Analytical testing devices

Its high purity also minimizes contamination during sensitive laboratory experiments.

5. Laser Equipment

Quartz is one of the preferred materials for laser systems because of its exceptional optical properties and excellent resistance to laser energy.

Applications include:

  • Laser protective windows
  • Laser resonator components
  • Beam transmission windows
  • Laser processing equipment
  • Industrial laser systems
  • Medical laser devices

Our precision-polished Quartz Glass Plates provide excellent optical transmission while maintaining dimensional stability under continuous laser operation.

6. Medical Equipment

Medical devices require materials with high purity, excellent chemical stability, and reliable optical performance. Quartz plates are widely used in medical and biotechnology equipment where cleanliness and durability are essential.

Typical applications include:

  • Medical analytical equipment
  • UV sterilization systems
  • Diagnostic instruments
  • Medical imaging equipment
  • Biotechnology devices
  • Laboratory medical instruments

High Purity Quartz Plate ensures reliable long-term performance and excellent resistance to repeated sterilization processes.

7. Analytical Instruments

Many scientific analytical instruments rely on quartz components because of their optical transparency and chemical inertness.

Applications include:

  • Spectrophotometers
  • Chromatography systems
  • Fluorescence analyzers
  • UV-Vis instruments
  • Gas analyzers
  • Environmental monitoring equipment
  • Scientific testing systems

Quartz plates provide stable optical performance and exceptional measurement accuracy.

8. Chemical Industry

The excellent corrosion resistance of quartz glass makes it an ideal material for harsh chemical environments.

Applications include:

  • Chemical reactors
  • Corrosion-resistant windows
  • Process observation windows
  • High-temperature reaction vessels
  • Acid-resistant equipment
  • Laboratory chemical systems

Quartz maintains excellent stability when exposed to most acids and corrosive chemicals, helping improve equipment reliability and service life.

9. Electronics Manufacturing

Modern electronics manufacturing requires precision materials with excellent insulation and dimensional stability.

Quartz plates are commonly used in:

  • Electronic processing equipment
  • Insulation components
  • Semiconductor packaging
  • PCB manufacturing
  • Precision assembly equipment
  • Electronic testing systems

Their superior electrical insulation properties make them suitable for high-frequency and high-temperature electronic applications.

10. LED Industry

The LED manufacturing process requires materials capable of maintaining dimensional accuracy and optical performance under elevated temperatures.

Quartz plates are widely used for:

  • LED epitaxy equipment
  • MOCVD systems
  • Process chamber windows
  • Heating components
  • Inspection windows
  • Optical protective covers

Their excellent thermal stability contributes to improved manufacturing consistency and production efficiency.

11. Aerospace Industry

Aerospace applications demand lightweight, durable materials capable of performing under extreme environmental conditions.

Quartz plates are used in:

  • Aerospace optical systems
  • High-temperature sensors
  • Precision inspection windows
  • Space research instruments
  • Navigation equipment
  • Scientific payloads

Their outstanding thermal resistance, low thermal expansion, and optical stability make them suitable for demanding aerospace environments.

Quartz Plate Manufacturing Process

At Shanghai Xinkehui New Material Co., Ltd., every Quartz Plate is manufactured through a rigorous production process to ensure exceptional purity, dimensional accuracy, optical quality, and long-term reliability. From raw material selection to final packaging, each step is carefully controlled to meet the stringent requirements of the semiconductor, optical, laboratory, and industrial sectors.

1. High-Purity Quartz Raw Material

The manufacturing process begins with carefully selected high-purity natural or synthetic quartz (SiO₂ ≥ 99.99%). Premium raw materials ensure excellent optical transmission, superior thermal stability, and ultra-low impurity levels required for high-performance applications.

2. High-Temperature Melting

The quartz material is melted at temperatures exceeding 1700°C to form homogeneous fused quartz. This process eliminates internal defects and creates a dense, stable material with outstanding physical and chemical properties.

3. Annealing Process

After melting, the quartz undergoes a precisely controlled annealing process to relieve internal stress. Proper annealing improves thermal shock resistance, dimensional stability, and mechanical strength while minimizing the risk of cracking during subsequent machining or high-temperature use.

4. Precision Cutting

The annealed quartz is cut into the required dimensions using high-precision cutting equipment. Custom sizes, thicknesses, and special shapes can be produced according to customer drawings and specifications.

5. Grinding & Shaping

Precision grinding ensures accurate dimensions, flatness, and edge quality. Additional machining processes such as chamfering, slotting, drilling, and CNC machining can also be performed to meet specific application requirements.

6. Secure Packaging

Finished quartz plates are carefully packaged using protective film, foam cushioning, vacuum packaging (if required), and export-grade wooden cases or cartons. Professional packaging minimizes the risk of damage during international transportation and ensures the products arrive safely at the customer’s facility.

Depending on the customer’s requirements, the quartz plate undergoes single-side polishing, double-side polishing (DSP), or optical-grade polishing. This process produces excellent surface flatness, low surface roughness, and superior optical transparency for demanding optical and semiconductor applications.

7. Ultrasonic Cleaning

After machining and polishing, each Quartz Plate is thoroughly cleaned using ultrasonic cleaning technology to remove dust, polishing residue, and microscopic contaminants. This ensures a clean surface suitable for high-precision and contamination-sensitive environments.

8. Quality Inspection

Every quartz plate undergoes comprehensive quality inspection before shipment. Inspection items include:

Dimensions and thickness
Surface quality
Flatness
Optical transparency
Bubble and inclusion inspection
Edge quality
Visual appearance

Only products that pass strict quality control standards are approved for delivery.

9. Secure Packaging

Finished quartz plates are carefully packaged using protective film, foam cushioning, vacuum packaging (if required), and export-grade wooden cases or cartons. Professional packaging minimizes the risk of damage during international transportation and ensures the products arrive safely at the customer’s facility.

High-Purity
Quartz Raw Material
High-Temperature
Melting
Annealing
Process
Precision
Cutting
Grinding &
Shaping
Optical
Polishing / DSP
Ultrasonic
Cleaning
Quality
Inspection
Secure
Packaging
Global
Shipment