{"id":1058,"date":"2024-08-13T15:50:15","date_gmt":"2024-08-13T07:50:15","guid":{"rendered":"https:\/\/www.sapphire-glass.net\/?p=1058"},"modified":"2024-08-14T13:37:19","modified_gmt":"2024-08-14T05:37:19","slug":"c-soi-wafer","status":"publish","type":"post","link":"https:\/\/www.sapphire-glass.net\/ja\/c-soi-wafer\/","title":{"rendered":"C-SOI\u30a6\u30a7\u30cf\u30fc"},"content":{"rendered":"

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u7d39\u4ecb<\/h2>\n\n\n\n

C-SOI\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u305d\u306e\u4e00\u7a2e\u3067\u3042\u308b\u3002 SOI\uff08\u30b7\u30ea\u30b3\u30f3\u30aa\u30f3\u30a4\u30f3\u30b7\u30e5\u30ec\u30fc\u30bf\u30fc\uff09\u30a6\u30a7\u30cf\u30fc<\/mark><\/a><\/strong>, \u3053\u306e\u7a7a\u6d1e\u306f\u3001\u7279\u5b9a\u306e\u5bf8\u6cd5\u3068\u4f4d\u7f6e\u3092\u6301\u3064\u3088\u3046\u306b\u8a2d\u8a08\u3067\u304d\u3053\u306e\u7a7a\u6d1e\u306f\u3001\u7279\u5b9a\u306e\u5bf8\u6cd5\u3068\u4f4d\u7f6e\u3092\u6301\u3064\u3088\u3046\u306b\u8a2d\u8a08\u3067\u304d\u3001\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff08MEMS\uff09\u3084\u3042\u308b\u7a2e\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3067\u6d3b\u7528\u3067\u304d\u308b\u72ec\u81ea\u306e\u96fb\u6c17\u7684\u30fb\u71b1\u7684\u7279\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n

\n
\n
\"BSOI-\u30a6\u30a7\u30cf\u30fc-4
C-SOI\u30a6\u30a7\u30cf\u30fc<\/figcaption><\/figure>\n<\/div><\/div>\n\n\n\n
\n

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u69cb\u9020<\/strong><\/h3>\n\n\n\n

\u30c8\u30c3\u30d7\u30b7\u30ea\u30b3\u30f3\u5c64\u3002<\/mark><\/strong> \u30c7\u30d0\u30a4\u30b9\u304c\u88fd\u9020\u3055\u308c\u308b\u6d3b\u6027\u30b7\u30ea\u30b3\u30f3\u5c64\u3067\u3001\u3053\u306e\u5c64\u306e\u539a\u3055\u306f\u3001\u30a6\u30a7\u30cf\u5168\u4f53\u306e\u5747\u4e00\u6027\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u7cbe\u5bc6\u306b\u5236\u5fa1\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

\u30ad\u30e3\u30d3\u30c6\u30a3\u5c64\u3002<\/mark><\/strong> \u3053\u306e\u7a7a\u6d1e\u306f\u3001\u7528\u9014\u306b\u3088\u3063\u3066\u5927\u304d\u3055\u3084\u5f62\u72b6\u304c\u7570\u306a\u308b\u3002\u30a6\u30a7\u30cf\u30fc\u306e\u6a5f\u68b0\u7684\u30fb\u96fb\u6c17\u7684\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u771f\u7a7a\u7a7a\u9593\u3002.<\/p>\n\n\n\n

\u57cb\u3082\u308c\u305f\u9178\u5316\u7269\uff08BOX\uff09\u5c64\u3002<\/strong> <\/mark>\u3053\u306e\u7d76\u7e01\u5c64\u306f\u3001\u30c8\u30c3\u30d7\u30fb\u30b7\u30ea\u30b3\u30f3\u5c64\u3068\u30d0\u30eb\u30af\u30fb\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u3092\u5206\u96e2\u3057\u3001\u30a2\u30af\u30c6\u30a3\u30d6\u30fb\u30c7\u30d0\u30a4\u30b9\u3092\u57fa\u677f\u304b\u3089\u7d76\u7e01\u3057\u3001\u5bc4\u751f\u5bb9\u91cf\u3092\u4f4e\u6e1b\u3057\u3001\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u30a2\u30af\u30c6\u30a3\u30d6\u30fb\u30c7\u30d0\u30a4\u30b9\u3092\u57fa\u677f\u304b\u3089\u5206\u96e2\u3057\u3001\u5bc4\u751f\u5bb9\u91cf\u3092\u6e1b\u3089\u3057\u3001\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3002.<\/p>\n\n\n\n

\u30cf\u30f3\u30c9\u30eb\u30fb\u30b7\u30ea\u30b3\u30f3\uff08\u57fa\u677f\uff09\u3002<\/mark> <\/strong>\u6700\u4e0b\u5c64\u306f\u30d0\u30eb\u30af\u30fb\u30b7\u30ea\u30b3\u30f3\u3067\u3001\u30a6\u30a7\u30cf\u30fc\u3092\u6a5f\u68b0\u7684\u306b\u652f\u3048\u308b\u3002.<\/p>\n<\/div>\n<\/div>\n\n\n\n

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u7528\u9014<\/strong><\/h3>\n\n\n\n

MEMS\u30c7\u30d0\u30a4\u30b9\u3002 <\/mark><\/strong>C-SOI\u30a6\u30a7\u30fc\u30cf\u306fMEMS\u306b\u5e83\u304f\u4f7f\u308f\u308c\u3066\u304a\u308a\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u306b\u3088\u3063\u3066\u30d3\u30fc\u30e0\u3001\u30df\u30e9\u30fc\u3001\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u306e\u53ef\u52d5\u90e8\u54c1\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 \u30ad\u30e3\u30d3\u30c6\u30a3\u306f\u3053\u308c\u3089\u306e\u7d20\u5b50\u304c\u52d5\u4f5c\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u7a7a\u9593\u3092\u63d0\u4f9b\u3059\u308b\u3002\u30ad\u30e3\u30d3\u30c6\u30a3\u306f\u3001\u3053\u308c\u3089\u306e\u7d20\u5b50\u304c\u52d5\u4f5c\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u7a7a\u9593\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n

RF\u304a\u3088\u3073\u9ad8\u901f\u30c7\u30d0\u30a4\u30b9\u3002 <\/mark><\/strong>SOI\u69cb\u9020\u306e\u7d76\u7e01\u7279\u6027\u3068\u30ad\u30e3\u30d3\u30c6\u30a3\u304c\u7d44\u307f\u5408\u308f\u3055\u308b\u3053\u3068\u3067\u3001\u5bc4\u751f\u5bb9\u91cf\u304c\u6e1b\u5c11\u3057\u3001C-SOI\u30a6\u30a7\u30fc\u30cf\u306f\u9ad8\u901f\u30fb\u9ad8\u5468\u6ce2\uff08RF\uff09\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3002\u304a\u3088\u3073\u7121\u7dda\u5468\u6ce2\u6570\uff08RF\uff09\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

\u71b1\u7ba1\u7406\u3002<\/mark><\/strong> \u3053\u306e\u7a7a\u6d1e\u306f\u3001\u71b1\u7ba1\u7406\u304c\u61f8\u5ff5\u3055\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u3067\u91cd\u8981\u306a\u65ad\u71b1\u6027\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

\n
\"R-4<\/figure>\n\n\n\n
\"OIP-13<\/figure>\n\n\n\n
\"OIP-10<\/figure>\n<\/figure>\n\n\n\n

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u5229\u70b9<\/h3>\n\n\n\n

\u5bc4\u751f\u5bb9\u91cf\u306e\u4f4e\u6e1b\u3002<\/mark> <\/strong>\u7d76\u7e01\u5c64\u3068\u30ad\u30e3\u30d3\u30c6\u30a3\u306f\u5bc4\u751f\u5bb9\u91cf\u306e\u6700\u5c0f\u5316\u306b\u5f79\u7acb\u3061\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u9ad8\u901f\u52d5\u4f5c\u3068\u4f4e\u6d88\u8cbb\u96fb\u529b\u306b\u3064\u306a\u304c\u308b\u3002.<\/p>\n\n\n\n

\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u306e\u5411\u4e0a\u3002<\/mark> <\/strong>\u3053\u306e\u30e6\u30cb\u30fc\u30af\u306a\u69cb\u9020\u306f\u3001\u7279\u306b\u9ad8\u5468\u6ce2\u3068\u9ad8\u6e29\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u304a\u3044\u3066\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

\u30c7\u30b6\u30a4\u30f3\u306e\u591a\u69d8\u6027\u3002<\/strong> <\/mark>\u30ad\u30e3\u30d3\u30c6\u30a3\u306e\u30b5\u30a4\u30ba\u3068\u5f62\u72b6\u3092\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u308b\u305f\u3081\u3001\u7279\u5b9a\u306e\u7279\u6027\u3092\u6301\u3064\u30c7\u30d0\u30a4\u30b9\u3092\u67d4\u8edf\u306b\u8a2d\u8a08\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u4ed5\u69d8<\/h2>\n\n\n\n

\u4e0b\u8a18\u306e\u8868\u306fXinekehui C-SOI\u30a6\u30a8\u30cf\u30fc\u306e\u4ed5\u69d8\u306b\u95a2\u3059\u308b\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3\u3067\u3059\u3002 \u5f0a\u793e\u306eC-SOI\u30a6\u30a8\u30cf\u30fc\u306f\u5e38\u306b\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3067\u3059\u306e\u3067\u3001\u8a73\u7d30\u306a\u60c5\u5831\u306b\u3064\u3044\u3066\u306f\u5f0a\u793e\u55b6\u696d\u90e8\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002\u306b\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002.<\/p>\n\n\n\n

\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
C-SOI\u30a6\u30a7\u30fc\u30cf\u76f4\u5f84 <\/strong><\/td>\n\n150mm\u3001200mm <\/td>\n\n<\/tr>\n\n
\u30c7\u30d0\u30a4\u30b9\u5c64\u306e\u4ed5\u69d8 <\/strong><\/td><\/tr>\n\n\n
\u6210\u9577\u65b9\u6cd5 <\/strong><\/td>\nCz\u3001MCz\u3001A-MCz <\/td>\n\n<\/tr>\n\n
\u7d50\u6676\u65b9\u4f4d<\/strong><\/td>\n<100>, <110>, <111><\/td> <\/td \n\n<\/tr>\n\n
N\u578b\u30c9\u30fc\u30d1\u30f3\u30c8<\/strong> <\/td>\n\n\u30a2\u30f3\u30c1\u30e2\u30f3\u3001\u30ea\u30f3<\/td>\n \n<\/tr>\n\n
P\u578b\u30c9\u30fc\u30d1\u30f3\u30c8<\/strong><\/td>\n\n\u30dc\u30ed\u30f3 <\/td>\n\n\n<\/tr>\n\n
\u62b5\u6297\u7387<\/strong><\/td>\n\n \u3088\u308a \u307e\u30677,000 Ohm-cm\n*\u62b5\u6297\u7387\u306e\u7bc4\u56f2\u306f\u30c9\u30fc\u30d1\u30f3\u30c8\u3068\u914d\u5411\u306b\u3088\u3063\u3066\u7570\u306a\u308b <\/td>\n\n\n<\/tr>\n\n\n
\u30c7\u30d0\u30a4\u30b9\u5c64\uff0f\u819c\u539a<\/strong> <\/td>\n\n 2 \u03bcm\u304b\u3089>200 \u03bcm\u307e\u3067<\/td>\n\n<\/tr>\n\n\n
\u30c7\u30d0\u30a4\u30b9\u5c64\uff0f\u819c\u539a\u516c\u5dee<\/strong><\/td>\n\n\u901a\u5e38\u00b10.5\u03bcm\u3001EC-SOI\u3067\u306f\u00b10.2\u03bcm\u307e\u3067\u4f4e\u4e0b <\/td>\n\n\n
\u57cb\u8535\u9178\u5316\u7269\uff08BOX\uff09\u4ed5\u69d8 <\/strong><\/td><\/tr>\n\n\n<\/tr>\n\n
\u30bf\u30a4\u30d7 <\/strong><\/td>\n\n\u30cf\u30f3\u30c9\u30eb\u307e\u305f\u306f\u30c7\u30d0\u30a4\u30b9\u30fb\u30a6\u30a7\u30fc\u30cf\u3001\u3042\u308b\u3044\u306f\u305d\u306e\u4e21\u65b9\u306b\u6210\u9577\u3057\u305f\u71b1\u9178\u5316\u7269 <\/td>\n\n\n<\/tr>\n\n<\/tr>\n\n
\u539a\u3055 <\/strong><\/td>\n\n0.3\u03bcm\u304b\u30894\u03bcm\u3001\u901a\u5e38\u306f0.5\u03bcm\u304b\u30892\u03bcm<\/td>\n\n\n<\/tr>\n\n\n
\u30cf\u30f3\u30c9\u30eb\u30a6\u30a8\u30cf\u4ed5\u69d8<\/strong><\/td><\/tr>\n\n
\u6210\u9577\u65b9\u6cd5 <\/strong> <\/td>\n\nCz\u3001MCz\u3001A-MCz\n\n<\/td> <\/tr>\n\n\n
Cz\u3001MCz\u3001A-MCz <\/strong><\/td>\n\n<100>, <110>, <111><\/td> <\/td \n\n<\/tr>\n\n
N\u578b\u30c9\u30fc\u30d1\u30f3\u30c8<\/strong> <\/td>\n\n\u30a2\u30f3\u30c1\u30e2\u30f3\u3001\u30ea\u30f3<\/td> \n\n<\/tr>\n\n
P\u578b\u30c9\u30fc\u30d1\u30f3\u30c8 <\/strong><\/td>\n\n\u30dc\u30ed\u30f3<\/td> \n\n<\/tr>\n\n
\u62b5\u6297\u7387 <\/strong><\/td>\n\n\u3088\u308a \u307e\u30677,000 Ohm-cm\n*\u62b5\u6297\u7387\u306e\u7bc4\u56f2\u306f\u30c9\u30fc\u30d1\u30f3\u30c8\u3068\u914d\u5411\u306b\u3088\u3063\u3066\u7570\u306a\u308b <\/td> \n\n<\/tr>\n\n\n
\u30cf\u30f3\u30c9\u30eb\u30a6\u30a7\u30cf\u30fc\u306e\u539a\u3055 <\/strong><\/td>\n\n200 mm\uff1a300\u03bcm\u304b\u3089950\u03bcm\u3001\u901a\u5e38\u306f725\u03bcm\n150 mm\uff1a300\u03bcm\uff5e950\u03bcm\u3001\u901a\u5e38380\u03bcm <\/td> \n\n<\/tr>\n\n
\u30a6\u30a7\u30fc\u30cf\u539a\u307f\u516c\u5dee <\/strong><\/td>\n\n\u00b15 \u03bcm<\/td> \n\n<\/tr>\n<\/tr>\n\n
\u88cf\u9762<\/strong><\/td>\n\n\u9178\u5316\u7269\u306b\u3088\u308b\u7814\u78e8\u307e\u305f\u306f\u30a8\u30c3\u30c1\u30f3\u30b0<\/td> \n\n<\/tr>\n\n
\u30ad\u30e3\u30d3\u30c6\u30a3\u4ed5\u69d8 <\/strong><\/td><\/tr>\n
\u30ad\u30e3\u30d3\u30c6\u30a3\u306e\u4f4d\u7f6e<\/strong><\/td>\n\n\u30a6\u30a7\u30cf\u30fc\u307e\u305f\u306f\u30c7\u30d0\u30a4\u30b9\u5c64\u3001\u307e\u305f\u306f\u57cb\u3082\u308c\u305f\u9178\u5316\u7269\u3092\u6271\u3046<\/td> \n\n<\/tr>\n
\u30ad\u30e3\u30d3\u30c6\u30a3\u6df1\u3055\uff08\u30b7\u30ea\u30b3\u30f3\uff09<\/strong><\/td>\n\n2 - 500 \u00b5m<\/td> \n\n<\/tr>\n\n
\u30df\u30cb\u30de\u30e0CD<\/strong><\/td>\n\n2 \u00b5m<\/td> \n\n<\/tr>\n\n\n
\u30ad\u30e3\u30d3\u30c6\u30a3\u306e\u6700\u5927\u30b9\u30d1\u30f3\u9577 vs \u30e1\u30f3\u30d6\u30ec\u30f3\u306e\u539a\u3055<\/strong><\/td>\n\n\u6a19\u6e96C-SOI\u30d7\u30ed\u30bb\u30b9\u3067<40:1 \u00b5m<\/td> \n\n<\/tr>\n\n
\u524d\u9762\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u30de\u30fc\u30af<\/strong><\/td><\/tr>\n\n
\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6\u3001\u57cb\u8a2d\u30ad\u30e3\u30d3\u30c6\u30a3\u3068\u524d\u9762\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u30de\u30fc\u30af<\/strong><\/td>\n\n\u00b11 \u00b5m<\/td> \n\n<\/tr>\n\n
\u30de\u30fc\u30af\u30c7\u30b6\u30a4\u30f3<\/strong><\/td>\n\n\u9867\u5ba2\u5c02\u7528\u30c4\u30fc\u30eb <\/td> \n\n<\/tr>\n\n<\/tbody><\/table><\/figure>\n\n\n\n

C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u52a0\u5de5\u6280\u8853<\/h2>\n\n\n\n

C-SOI(\u30ad\u30e3\u30d3\u30c6\u30a3\u30b7\u30ea\u30b3\u30f3\u30aa\u30f3\u30a4\u30f3\u30b7\u30e5\u30ec\u30fc\u30bf\u30fc)\u30a6\u30a7\u30cf\u30fc\u306e\u52a0\u5de5\u6280\u8853\u306f\u3001\u4e3b\u306b\u5148\u7aef\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30c7\u30d0\u30a4\u30b9\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306b\u3001\u534a\u5c0e\u4f53\u7523\u696d\u3067\u4f7f\u7528\u3055\u308c\u308b\u7279\u6b8a\u306a\u88fd\u9020\u6280\u8853\u3067\u3059\u3002C-SOI\uff08\u30ad\u30e3\u30d3\u30c6\u30a3\u30fb\u30b7\u30ea\u30b3\u30f3\u30fb\u30aa\u30f3\u30fb\u30a4\u30f3\u30b7\u30e5\u30ec\u30fc\u30bf\u30fc\uff09\u30a6\u30a7\u30cf\u30fc\u306e\u52a0\u5de5\u6280\u8853\u306f\u3001\u4e3b\u306b\u5148\u9032\u7684\u306a\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30c3\u30af\u30fb\u30c7\u30d0\u30a4\u30b9\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306b\u3001\u534a\u5c0e\u4f53\u7523\u696d\u3067\u4f7f\u7528\u3055\u308c\u308b\u7279\u6b8a\u306a\u88fd\u9020\u6280\u8853\u3067\u3059\u3002RF\uff08\u7121\u7dda\u5468\u6ce2\u6570\uff09\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001MEMS\uff08\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff09\u3001\u9ad8\u5ea6\u306aCMOS\uff08\u76f8\u88dc\u578b\u91d1\u5c5e-\u9178\u5316\u819c-\u534a\u5c0e\u4f53\uff09\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306a\u3069\u3067\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306e\u5411\u4e0a\u304c\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002CMOS\uff08\u76f8\u88dc\u578b\u91d1\u5c5e-\u9178\u5316\u819c-\u534a\u5c0e\u4f53\uff09\u6280\u8853\u306a\u3069\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

1.\u30d9\u30fc\u30b9SOI\u30a6\u30a7\u30cf\u88fd\u9020<\/strong><\/p>\n\n\n\n

\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001SOI\uff08Silicon on Insulator\uff09\u30a6\u30a7\u30cf\u30fc\u306e\u88fd\u9020\u304b\u3089\u59cb\u307e\u308a\u3001Smart Cut\u2122\u6280\u8853\u307e\u305f\u306fSIMOX\uff08Separation by IMplantation of OXygen\uff09\u30d7\u30ed\u30bb\u30b9\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002SOI\u30a6\u30a7\u30cf\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u3042\u308b\u57cb\u3082\u308c\u305f\u9178\u5316\u7269\uff08BOX\uff09\u5c64\u306e\u4e0a\u306b\u3001\u8584\u3044\u30b7\u30ea\u30b3\u30f3\u5c64\uff08\u30c7\u30d0\u30a4\u30b9\u5c64\uff09\u304c\u5f62\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u5c64\u306f\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u3042\u308b\u3002.<\/p>\n\n\n\n

2.\u30ad\u30e3\u30d3\u30c6\u30a3\u5f62\u6210<\/strong><\/p>\n\n\n\n

C-SOI\u30a6\u30a7\u30fc\u30cf\u306e\u4e3b\u306a\u7279\u5fb4\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u5c64\u5185\u306b\u7a7a\u6d1e\u304c\u5f62\u6210\u3055\u308c\u3066\u3044\u308b\u3053\u3068\u3067\u3042\u308b\u3002 \u3053\u308c\u3089\u306e\u7a7a\u6d1e\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u5c64\u306e\u4e0b\u3068\u57cb\u3082\u308c\u305f\u9178\u5316\u7269\u5c64\u306e\u4e2d\u306b\u5f62\u6210\u3055\u308c\u308b\u3002\u3053\u308c\u3089\u306e\u7a7a\u6d1e\u306f\u30c7\u30d0\u30a4\u30b9\u5c64\u306e\u4e0b\u3068\u57cb\u3082\u308c\u305f\u9178\u5316\u7269\u5c64\u306e\u4e2d\u306b\u5f62\u6210\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

\u30ad\u30e3\u30d3\u30c6\u30a3\u5f62\u6210\u306f\u3001\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u69d8\u3005\u306a\u6280\u8853\u306b\u3088\u3063\u3066\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 \u30d7\u30ed\u30bb\u30b9\u306f\u3001\u610f\u56f3\u3055\u308c\u305f\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u306b\u3068\u3063\u3066\u91cd\u8981\u3067\u3042\u308b\u6b63\u78ba\u306a\u5bf8\u6cd5\u306e\u30ad\u30e3\u30d3\u30c6\u30a3\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3055\u308c\u308b\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u6b63\u78ba\u306a\u5bf8\u6cd5\u306e\u7a7a\u6d1e\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n

\u7570\u65b9\u6027\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u4e00\u822c\u7684\u306b\u3001\u7279\u5b9a\u306e\u5f62\u72b6\u3084\u30b5\u30a4\u30ba\u3092\u6301\u3064\u660e\u78ba\u306a\u7a7a\u6d1e\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

3.\u8584\u819c\u84b8\u7740<\/strong><\/p>\n\n\n\n

\u30ad\u30e3\u30d3\u30c6\u30a3\u304c\u5f62\u6210\u3055\u308c\u305f\u5f8c\u3001\u8584\u3044\u30b7\u30ea\u30b3\u30f3\u819c\u304c\u30ad\u30e3\u30d3\u30c6\u30a3\u9818\u57df\u4e0a\u306b\u5806\u7a4d\u3055\u308c\u308b\u3002 \u3053\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u3092\u5bc6\u9589\u3057\u3001\u6700\u7d42\u7684\u306a\u30c7\u30d0\u30a4\u30b9\u5c64\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u3001\u6975\u3081\u3066\u91cd\u8981\u3067\u3042\u308b\u3002\u3053\u306e\u5de5\u7a0b\u306f\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u3092\u5bc6\u9589\u3057\u3001\u6700\u7d42\u7684\u306a\u30c7\u30d0\u30a4\u30b9\u5c64\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u3001\u975e\u5e38\u306b\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

\u4f7f\u7528\u3055\u308c\u308b\u6210\u819c\u65b9\u6cd5\u306b\u306f\u3001\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09\u306e\u3088\u3046\u306a\u6280\u8853\u304c\u542b\u307e\u308c\u3001\u8584\u304f\u5747\u4e00\u306a\u30b7\u30ea\u30b3\u30f3\u5c64\u304c\u30a6\u30a7\u30cf\u5168\u4f53\u306b\u5806\u7a4d\u3055\u308c\u308b\u3002\u4f7f\u7528\u3055\u308c\u308b\u65b9\u6cd5\u306f\u3001\u8584\u304f\u5747\u4e00\u306a\u30b7\u30ea\u30b3\u30f3\u5c64\u304c\u30a6\u30a7\u30cf\u5168\u4f53\u306b\u308f\u305f\u3063\u3066\u5806\u7a4d\u3055\u308c\u308b\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u306e\u3088\u3046\u306a\u6280\u8853\u3092\u542b\u3080\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

4.\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u30ec\u30a4\u30e4\u30fc\u30fb\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc<\/strong><\/p>\n\n\n\n

\u5834\u5408\u306b\u3088\u3063\u3066\u306f\u3001\u7a7a\u6d1e\u3092\u542b\u3080\u5c64\u3092\u5225\u306e\u57fa\u677f\u306b\u8ee2\u5199\u3059\u308b\u305f\u3081\u306b\u63a5\u5408\u30d7\u30ed\u30bb\u30b9\u304c\u63a1\u7528\u3055\u308c\u308b\u3002 \u3053\u308c\u306f\u3001\u7a7a\u6d1e\u69cb\u9020\u304c\u30cf\u30f3\u30c9\u30eb\u30a6\u30a7\u30cf\u306b\u63a5\u5408\u3055\u308c\u3001\u305d\u306e\u5f8c\u3001\u5143\u306e\u30a6\u30a7\u30cf\u304c\u53d6\u308a\u9664\u304b\u308c\u308b\u304b\u8584\u304f\u3055\u308c\u308b\u30a6\u30a7\u30cf\u63a5\u5408\u306b\u3088\u3063\u3066\u9054\u6210\u3055\u308c\u308b\u3002\u30ad\u30e3\u30d3\u30c6\u30a3\u69cb\u9020\u304c\u30cf\u30f3\u30c9\u30eb\u30fb\u30a6\u30a7\u30fc\u30cf\u306b\u63a5\u7740\u3055\u308c\u3001\u5143\u306e\u30a6\u30a7\u30fc\u30cf\u304c\u53d6\u308a\u9664\u304b\u308c\u308b\u304b\u8584\u304f\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

\u63a5\u5408\u5de5\u7a0b\u3067\u306f\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u306e\u5b8c\u5168\u6027\u3068\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u54c1\u8cea\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u3001\u9ad8\u3044\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u3068\u4f4e\u3044\u6b20\u9665\u7387\u3092\u78ba\u4fdd\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n

5.\u7814\u78e8\u3068\u9593\u4f10<\/strong><\/p>\n\n\n\n

\u6700\u4e0a\u5c64\u306e\u30b7\u30ea\u30b3\u30f3\u5c64\uff08\u30c7\u30d0\u30a4\u30b9\u5c64\uff09\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u5fc5\u8981\u306a\u539a\u3055\u307e\u3067\u7814\u78e8\u3055\u308c\u3001\u8584\u304f\u3055\u308c\u308b\u3002 \u3053\u308c\u306f\u901a\u5e38\u3001\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u9069\u3057\u305f\u6b20\u9665\u306e\u306a\u3044\u6ed1\u3089\u304b\u306a\u8868\u9762\u3092\u5f97\u308b\u305f\u3081\u306b\u3001CMP\uff08\u5316\u5b66\u7684\u6a5f\u68b0\u7814\u78e8\uff09\u3092\u7528\u3044\u3066\u9054\u6210\u3055\u308c\u308b\u3002\u7814\u78e8\uff09\u306b\u3088\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u9069\u3057\u305f\u6b20\u9665\u306e\u306a\u3044\u6ed1\u3089\u304b\u306a\u8868\u9762\u3092\u5f97\u308b\u3002.<\/p>\n\n\n\n

6.\u30c7\u30d0\u30a4\u30b9\u88fd\u9020<\/strong><\/p>\n\n\n\n

C-SOI\u30a6\u30a7\u30cf\u304c\u6e96\u5099\u3055\u308c\u308b\u3068\u3001\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u3001\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u306a\u3069\u306e\u6a19\u6e96\u7684\u306a\u534a\u5c0e\u4f53\u52a0\u5de5\u6280\u8853\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u6240\u671b\u306e\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u3084MEMS\u30c7\u30d0\u30a4\u30b9\u3092\u4f5c\u88fd\u3059\u308b\u3002.<\/p>\n\n\n\n

7.\u54c1\u8cea\u7ba1\u7406\u3068\u30c6\u30b9\u30c8<\/strong><\/p>\n\n\n\n

\u30a6\u30a7\u30cf\u30fc\u306e\u6b20\u9665\u691c\u67fb\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u5bf8\u6cd5\u306e\u6e2c\u5b9a\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u96fb\u6c17\u7684\u691c\u67fb\u306a\u3069\u3001\u30a6\u30a7\u30cf\u30fc\u304c\u8981\u6c42\u3055\u308c\u308b\u4ed5\u69d8\u306b\u9069\u5408\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u305f\u3081\u306b\u3001\u52a0\u5de5\u6bb5\u968e\u3092\u901a\u3058\u3066\u53b3\u683c\u306a\u54c1\u8cea\u7ba1\u7406\u304c\u5b9f\u65bd\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u306b\u306f\u3001\u6b20\u9665\u691c\u67fb\u3001\u30ad\u30e3\u30d3\u30c6\u30a3\u5bf8\u6cd5\u306e\u6e2c\u5b9a\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u96fb\u6c17\u7684\u30c6\u30b9\u30c8\u304c\u542b\u307e\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n

\"H3901a1a4fe474787b8fb7d867f2d1101V<\/figure>\n\n\n\n

\u65b0\u5bb6\u7687\u306e\u5f37\u307f<\/h2>\n\n\n\n

C-SOI\uff08Complimentary-Silicon-On-Insulator\uff09\u30a6\u30a7\u30fc\u30cf\u306e\u52a0\u5de5\u306b\u95a2\u3057\u3066\u3001\u65b0\u5bb6\u532f\u306b\u306f\u6b21\u306e\u3088\u3046\u306a\u5229\u70b9\u304c\u3042\u308b\u3002<\/p>\n\n\n\n

1.\u6750\u6599\u8cbb\u3068\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u6700\u9069\u5316<\/strong><\/p>\n\n\n\n

(1) \u539f\u6750\u6599\u306e\u52b9\u7387\u7684\u4f7f\u7528\u3002<\/strong> SOI\u6280\u8853\u306e\u4f7f\u7528\u306f\u3001\u9ad8\u7d14\u5ea6\u30b7\u30ea\u30b3\u30f3\u3092\u4e3b\u8981\u306a\u90e8\u5206\u306b\u306e\u307f\u4f7f\u7528\u3059\u308b\u305f\u3081\u3001\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u306e\u7121\u99c4\u3092\u6e1b\u3089\u3057\u3001\u5168\u4f53\u7684\u306a\u6750\u6599\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

(2) \u5b89\u5b9a\u3057\u305f\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u3002<\/strong> \u539f\u6750\u6599\u8abf\u9054\u3068\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u30fb\u30de\u30cd\u30b8\u30e1\u30f3\u30c8\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u539f\u6750\u6599\u306e\u5b89\u5b9a\u4f9b\u7d66\u3092\u78ba\u4fdd\u3057\u3001\u5909\u52d5\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

2.\u6280\u8853\u7684\u7cbe\u5ea6\u3068\u5de5\u7a0b\u7ba1\u7406<\/strong><\/p>\n\n\n\n

(1)\u6975\u3081\u3066\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u3002<\/strong> C-SOI\u30a6\u30a7\u30cf\u30fc\u306e\u88fd\u9020\u3067\u306f\u3001\u539a\u307f\u3084\u5e73\u5766\u5ea6\u306a\u3069\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002 \u9ad8\u7cbe\u5ea6\u52a0\u5de5\u6280\u8853\u306b\u3088\u308a\u3001\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u304c\u53b3\u683c\u306a\u4ed5\u69d8\u306b\u9069\u5408\u3059\u308b\u3053\u3068\u304c\u4fdd\u8a3c\u3055\u308c\u3001\u88fd\u54c1\u54c1\u8cea\u306e\u4e00\u8cab\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002\u9ad8\u7cbe\u5ea6\u52a0\u5de5\u6280\u8853\u306f\u3001\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u304c\u53b3\u683c\u306a\u4ed5\u69d8\u3092\u6e80\u305f\u3059\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u3001\u305d\u308c\u306b\u3088\u3063\u3066\u88fd\u54c1\u306e\u54c1\u8cea\u3068\u4e00\u8cab\u6027\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/p>\n\n\n\n

(2)\u30a6\u30a7\u30cf\u6b20\u9665\u306e\u4f4e\u6e1b\u3002<\/strong> \u9ad8\u5ea6\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u4e0a\u306e\u5fae\u7d30\u6b20\u9665\u3092\u52b9\u679c\u7684\u306b\u4f4e\u6e1b\u3057\u3001\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

3.\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u512a\u4f4d\u6027<\/strong><\/p>\n\n\n\n

(1) \u6d88\u8cbb\u96fb\u529b\u3092\u524a\u6e1b\u3057\u3001\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002 <\/strong>C-SOI\u30a6\u30a8\u30cf\u306f\u3001\u56de\u8def\u3001\u7279\u306b\u9ad8\u5468\u6ce2\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u512a\u308c\u305f\u6027\u80fd\u3092\u767a\u63ee\u3057\u3001\u30e2\u30d0\u30a4\u30eb\u6a5f\u5668\u3084\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u4e0d\u53ef\u6b20\u306a\u6d88\u8cbb\u96fb\u529b\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3057\u3001\u901f\u5ea6\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u30e2\u30d0\u30a4\u30eb\u6a5f\u5668\u3084\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n\n\n\n

(2) \u71b1\u7ba1\u7406\u80fd\u529b\u306e\u5411\u4e0a\u3002 <\/strong>SOI\u69cb\u9020\u306e\u7d76\u7e01\u5c64\u306f\u3001\u5bc4\u751f\u5bb9\u91cf\u3092\u52b9\u679c\u7684\u306b\u6e1b\u3089\u3057\u3001\u30ea\u30fc\u30af\u96fb\u6d41\u3092\u6e1b\u3089\u3057\u3001\u71b1\u7ba1\u7406\u80fd\u529b\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u306e\u80fd\u529b\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

4.\u30d7\u30ed\u30bb\u30b9\u306e\u67d4\u8edf\u6027\u3068\u4e92\u63db\u6027<\/strong><\/p>\n\n\n\n

(1) \u8907\u6570\u306e\u88fd\u9020\u5de5\u7a0b\u306b\u5bfe\u5fdc\u3002 <\/strong>C-SOI\u30a6\u30a7\u30fc\u30cf\u306f\u3001CMOS\u30d7\u30ed\u30bb\u30b9\u3092\u542b\u3080\u69d8\u3005\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3068\u4e92\u63db\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u65e2\u5b58\u306e\u88fd\u9020\u30e9\u30a4\u30f3\u3078\u306e\u7d71\u5408\u304c\u5bb9\u6613\u3067\u3059\u3002\u65e2\u5b58\u306e\u751f\u7523\u30e9\u30a4\u30f3\u3078\u306e\u7d71\u5408\u304c\u5bb9\u6613\u306b\u306a\u308a\u3001\u88c5\u7f6e\u8abf\u6574\u3084\u30d7\u30ed\u30bb\u30b9\u6539\u5584\u306e\u5fc5\u8981\u6027\u304c\u8efd\u6e1b\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n

(2) \u67d4\u8edf\u306a\u30c7\u30b6\u30a4\u30f3\u30b9\u30da\u30fc\u30b9\u3002 <\/strong>C-SOI\u6280\u8853\u306b\u3088\u308a\u3001\u8a2d\u8a08\u8005\u306f\u30c7\u30d0\u30a4\u30b9\u306e\u30ec\u30a4\u30a2\u30a6\u30c8\u3084\u69cb\u9020\u306b\u5927\u304d\u306a\u67d4\u8edf\u6027\u3092\u6301\u3064\u3053\u3068\u304c\u3067\u304d\u3001\u3088\u308a\u30b3\u30f3\u30d1\u30af\u30c8\u3067\u52b9\u7387\u7684\u306a\u8a2d\u8a08\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002C-SOI\u6280\u8853\u306b\u3088\u308a\u3001\u8a2d\u8a08\u8005\u306f\u30c7\u30d0\u30a4\u30b9\u306e\u30ec\u30a4\u30a2\u30a6\u30c8\u3084\u69cb\u9020\u306b\u5927\u304d\u306a\u67d4\u8edf\u6027\u3092\u6301\u3064\u3053\u3068\u304c\u3067\u304d\u3001\u3088\u308a\u30b3\u30f3\u30d1\u30af\u30c8\u3067\u52b9\u7387\u7684\u306a\u8a2d\u8a08\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

5.\u5e02\u5834\u3068\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5229\u70b9<\/strong><\/p>\n\n\n\n

(1) \u9ad8\u9700\u8981\u5e02\u5834\u3078\u306e\u5bfe\u5fdc\u3002 <\/strong>5G\u3001\u4eba\u5de5\u77e5\u80fd\u3001\u30e2\u30ce\u306e\u30a4\u30f3\u30bf\u30fc\u30cd\u30c3\u30c8\u306a\u3069\u306e\u65b0\u8208\u6280\u8853\u306e\u6025\u901f\u306a\u767a\u5c55\u306b\u4f34\u3044\u3001C-SOI\u30a6\u30a8\u30cf\u30fc\u306e\u9700\u8981\u3082\u5897\u52a0\u3057\u3066\u3044\u307e\u3059\u3002\u9ad8\u5ea6\u306a\u88fd\u9020\u80fd\u529b\u306b\u3088\u308a\u3001\u4f01\u696d\u306f\u5e02\u5834\u306e\u9700\u8981\u306b\u8fc5\u901f\u306b\u5bfe\u5fdc\u3057\u3001\u3088\u308a\u591a\u304f\u306e\u30d3\u30b8\u30cd\u30b9\u30c1\u30e3\u30f3\u30b9\u3092\u3064\u304b\u3080\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n\n\n

(2) \u5fdc\u7528\u7bc4\u56f2\u304c\u5e83\u3044\u3002<\/strong> C-SOI\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u79fb\u52d5\u4f53\u901a\u4fe1\u3001\u30ab\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u306e\u5206\u91ce\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u5f37\u529b\u306a\u5e02\u5834\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002C-SOI\u30a6\u30a8\u30cf\u306f\u79fb\u52d5\u4f53\u901a\u4fe1\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b.<\/p>\n\n\n\n

\u305d\u306e\u4ed6\u306e\u88fd\u54c1<\/h2>\n\n\n\n

C-SOI\u30a6\u30a8\u30cf\u30fc\u306e\u307b\u304b\u3001\u591a\u304f\u306e\u5149\u5b66\u88fd\u54c1\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3054\u76f8\u8ac7\u3092\u304a\u5f85\u3061\u3057\u3066\u304a\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

\n
\n

\u30b5\u30d5\u30a1\u30a4\u30a2\u30fb\u30a6\u30a7\u30fc\u30cf<\/a><\/strong><\/p>\n<\/div>\n\n\n\n

\n

\u70ad\u5316\u30b1\u30a4\u7d20\uff08SIC\uff09\u30a6\u30a7\u30cf\u30fc<\/a><\/strong><\/p>\n<\/div>\n\n\n\n

\n

\u30b7\u30ea\u30b3\u30f3\uff08SI\uff09\u30a6\u30a7\u30cf\u30fc<\/a><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

\n
\n
\"\u30b5\u30d7\u30ea\u30a6\u30a8\u30cf\u30fc-6<\/a>
\u30b5\u30d5\u30a1\u30a4\u30a2\u30fb\u30a6\u30a7\u30fc\u30cf<\/a><\/strong><\/figcaption><\/figure>\n<\/div><\/div>\n\n\n\n
\n
\"20240624163633-1C-SOI\u30a6\u30a7\u30cf\u30fc\"<\/a>
\u70ad\u5316\u30b1\u30a4\u7d20\uff08SIC\uff09\u30a6\u30a7\u30cf\u30fc<\/a><\/strong><\/figcaption><\/figure>\n<\/div><\/div>\n\n\n\n
\n
\"1-1<\/a>
\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u30fc<\/a><\/strong><\/figcaption><\/figure>\n<\/div><\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

Introduction of C-SOI Wafer C-SOI wafers are a variant of SOI (Silicon-On-Insulator) wafers, where a cavity is […]<\/p>\n","protected":false},"author":1,"featured_media":1062,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_joinchat":[],"footnotes":""},"categories":[3,10],"tags":[],"class_list":["post-1058","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-products-catelog","category-soi-wafer"],"acf":[],"views":5288,"_links":{"self":[{"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/posts\/1058","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/comments?post=1058"}],"version-history":[{"count":20,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/posts\/1058\/revisions"}],"predecessor-version":[{"id":1096,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/posts\/1058\/revisions\/1096"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/media\/1062"}],"wp:attachment":[{"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/media?parent=1058"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/categories?post=1058"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sapphire-glass.net\/ja\/wp-json\/wp\/v2\/tags?post=1058"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}